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Journal of the Electrochemical Society

Volumn 156, Issue 7, 2009, Pages

Comparison of thermal and plasma-enhanced ALD/CVD of vanadium pentoxide

(7) Musschoot, J a Deduytsche, D a Poelman, H a Haemers, J a Van Meirhaeghe, R L a Van Den Berghe, S b Detavernier, C a

a GHENT UNIVERSITY (Belgium)

b BELGIAN NUCLEAR RESEARCH CENTRE (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON CONTAMINATION; CRYSTALLINITY; HIGH PURITY; ISO-PROPOXIDE; POST ANNEALING; REACTIVE GAS; TEMPERATURE WINDOW; THERMAL ALD; VANADIUM PENTOXIDE; VANADYL;

ATOMIC LAYER DEPOSITION; ATOMIC SPECTROSCOPY; CARBON FILMS; CHEMICAL VAPOR DEPOSITION; EMISSION SPECTROSCOPY; HELIUM; MOLECULAR SPECTROSCOPY; OPTICAL EMISSION SPECTROSCOPY; OXYGEN; PLASMAS; SPECTRUM ANALYSIS; VANADIUM; VANADIUM ALLOYS; VANADIUM COMPOUNDS; X RAY PHOTOELECTRON SPECTROSCOPY;

AMORPHOUS FILMS;

EID: 65949104055 PISSN: 00134651 EISSN: None Source Type: Journal
DOI: 10.1149/1.3133169 Document Type: Article

Times cited : (74)

References (24)

1
- 4244014869
- 0031-9007,. 10.1103/PhysRevLett.3.34
- F. J. Morin, Phys. Rev. Lett. 0031-9007, 3, 34 (1959). 10.1103/PhysRevLett.3.34
- (1959) Phys. Rev. Lett. , vol.3 , pp. 34
- Morin, F.J.¹

2
- 36049053404
- 0034-6861,. 10.1103/RevModPhys.40.677
- N. F. Mott, Rev. Mod. Phys. 0034-6861, 40, 677 (1968). 10.1103/RevModPhys.40.677
- (1968) Rev. Mod. Phys. , vol.40 , pp. 677
- Mott, N.F.¹

3
- 0029370571
- 0040-6090,. 10.1016/0040-6090(95)06617-9
- M. Benmoussa, E. Ibnouelghazi, A. Bennouna, and E. L. Ameziane, Thin Solid Films 0040-6090, 265, 22 (1995). 10.1016/0040-6090(95)06617-9
- (1995) Thin Solid Films , vol.265 , pp. 22
- Benmoussa, M.¹ Ibnouelghazi, E.² Bennouna, A.³ Ameziane, E.L.⁴

4
- 0001952352
- 0926-860X,. 10.1016/S0926-860X(97)00017-3
- J. Haber, M. Witko, and R. Tokarz, Appl. Catal., A 0926-860X, 157, 3 (1997). 10.1016/S0926-860X(97)00017-3
- (1997) Appl. Catal., A , vol.157 , pp. 3
- Haber, J.¹ Witko, M.² Tokarz, R.³

5
- 33751018533
- 0021-9517,. 10.1016/j.jcat.2006.09.022
- H. Poelman, B. F. Sels, M. Olea, K. Eufinger, J. S. Paul, B. Moens, I. Sack, V. Balcaen, F. Bertinchamps, E. M. Gaigneaux, J. Catal. 0021-9517, 245, 156 (2007). 10.1016/j.jcat.2006.09.022
- (2007) J. Catal. , vol.245 , pp. 156
- Poelman, H.¹ Sels, B.F.² Olea, M.³ Eufinger, K.⁴ Paul, J.S.⁵ Moens, B.⁶ Sack, I.⁷ Balcaen, V.⁸ Bertinchamps, F.⁹ Gaigneaux, E.M.¹⁰

6
- 0036093162
- 0926-860X,. 10.1016/S0926-860X(01)00975-9
- J. Keränen, A. Auroux, S. Ek, and L. Niinistö, Appl. Catal., A 0926-860X, 228, 213 (2002). 10.1016/S0926-860X(01)00975-9
- (2002) Appl. Catal., A , vol.228 , pp. 213
- Keränen, J.¹ Auroux, A.² Ek, S.³ Niinistö, L.⁴

7
- 38349025680
- 10.1016/j.molcata.2007.11.001
- T. Machold, W. Y. Suprun, and H. Papp, J. Mol. Catal. A: Chem., 280, 122 (2008). 10.1016/j.molcata.2007.11.001
- (2008) J. Mol. Catal. A: Chem. , vol.280 , pp. 122
- MacHold, T.¹ Suprun, W.Y.² Papp, H.³

8
- 41449098288
- 0021-9517,. 10.1016/j.jcat.2008.02.007
- T. Kim and I. E. Wachs, J. Catal. 0021-9517, 255, 197 (2008). 10.1016/j.jcat.2008.02.007
- (2008) J. Catal. , vol.255 , pp. 197
- Kim, T.¹ Wachs, I.E.²

9
- 0034294316
- 1099-0062,. 10.1149/1.1391187
- J. C. Badot, S. Ribes, E. B. Yousfi, V. Vivier, J. P. Pereira-Ramos, N. Baffier, and D. Lincot, Electrochem. Solid-State Lett. 1099-0062, 3, 485 (2000). 10.1149/1.1391187
- (2000) Electrochem. Solid-State Lett. , vol.3 , pp. 485
- Badot, J.C.¹ Ribes, S.² Yousfi, E.B.³ Vivier, V.⁴ Pereira-Ramos, J.P.⁵ Baffier, N.⁶ Lincot, D.⁷

10
- 10844255554
- 0959-9428,. 10.1039/b410324f
- J. C. Badot, A. Mantoux, N. Baffier, O. Dubrunfaut, and D. Lincot, J. Mater. Chem. 0959-9428, 14, 3411 (2004). 10.1039/b410324f
- (2004) J. Mater. Chem. , vol.14 , pp. 3411
- Badot, J.C.¹ Mantoux, A.² Baffier, N.³ Dubrunfaut, O.⁴ Lincot, D.⁵

11
- 33747063343
- 0022-3697,. 10.1016/j.jpcs.2006.01.098
- J. C. Badot, A. Mantoux, N. Baffier, O. Dubrunfaut, and D. Lincot, J. Phys. Chem. Solids 0022-3697, 67, 1270 (2006). 10.1016/j.jpcs.2006.01.098
- (2006) J. Phys. Chem. Solids , vol.67 , pp. 1270
- Badot, J.C.¹ Mantoux, A.² Baffier, N.³ Dubrunfaut, O.⁴ Lincot, D.⁵

12
- 36749015194
- 0022-3727,. 10.1088/0022-3727/40/24/019
- N. Fateh, G. A. Fontalvo, and C. Mitterer, J. Phys. D: Appl. Phys. 0022-3727, 40, 7716 (2007). 10.1088/0022-3727/40/24/019
- (2007) J. Phys. D: Appl. Phys. , vol.40 , pp. 7716
- Fateh, N.¹ Fontalvo, G.A.² Mitterer, C.³

13
- 43349103339
- 1023-8883,. 10.1007/s11249-008-9307-4
- N. Fateh, G. A. Fontalvo, and C. Mitterer, Tribol. Lett. 1023-8883, 30, 21 (2008). 10.1007/s11249-008-9307-4
- (2008) Tribol. Lett. , vol.30 , pp. 21
- Fateh, N.¹ Fontalvo, G.A.² Mitterer, C.³

14
- 0030086051
- 0013-4651,. 10.1149/1.1836500
- C. Dücsö, N. Q. Khanh, Z. Horváth, I. Bärsony, M. Utriainen, S. Lehto, M. Nieminen, and L. Niinistö, J. Electrochem. Soc. 0013-4651, 143, 683 (1996). 10.1149/1.1836500
- (1996) J. Electrochem. Soc. , vol.143 , pp. 683
- Dücsö, C.¹ Khanh, N.Q.² Horváth, Z.³ Bärsony, I.⁴ Utriainen, M.⁵ Lehto, S.⁶ Nieminen, M.⁷ Niinistö, L.⁸

15
- 35648995895
- 0021-8979,. 10.1063/1.2798384
- Q. Xie, Y. -L. Jiang, C. Detavernier, D. Deduytsche, R. L. Van Meirhaeghe, G. -P. Ru, B. -Z. Li, and X. -P. Qu, J. Appl. Phys. 0021-8979, 102, 083521 (2007). 10.1063/1.2798384
- (2007) J. Appl. Phys. , vol.102 , pp. 083521
- Xie, Q.¹ Jiang, Y.-L.² Detavernier, C.³ Deduytsche, D.⁴ Van Meirhaeghe, R.L.⁵ Ru, G.-P.⁶ Li, B.-Z.⁷ Qu, X.-P.⁸

16
- 57149143176
- 0167-9317,. 10.1016/j.mee.2008.09.036
- J. Musschoot, Q. Xie, D. Deduytsche, S. Van den Berghe, R. L. Van Meirhaeghe, and C. Detavernier, Microelectron. Eng. 0167-9317, 86, 72 (2009). 10.1016/j.mee.2008.09.036
- (2009) Microelectron. Eng. , vol.86 , pp. 72
- Musschoot, J.¹ Xie, Q.² Deduytsche, D.³ Van Den Berghe, S.⁴ Van Meirhaeghe, R.L.⁵ Detavernier, C.⁶

17
- 44649110202
- 0021-8979,. 10.1063/1.2924406
- S. B. S. Heil, J. L. van Hemmen, M. C. M. van de Sanden, and W. M. M. Kessels, J. Appl. Phys. 0021-8979, 103, 103302 (2008). 10.1063/1.2924406
- (2008) J. Appl. Phys. , vol.103 , pp. 103302
- Heil, S.B.S.¹ Van Hemmen, J.L.² Van De Sanden, M.C.M.³ Kessels, W.M.M.⁴

18
- 0005265655
- 0039-6028,. 10.1016/0039-6028(73)90399-3
- M. N. Colpaert, P. Clauws, L. Fiermans, and J. Vennik, Surf. Sci. 0039-6028, 36, 513 (1973). 10.1016/0039-6028(73)90399-3
- (1973) Surf. Sci. , vol.36 , pp. 513
- Colpaert, M.N.¹ Clauws, P.² Fiermans, L.³ Vennik, J.⁴

19
- 2942672945
- 0368-2048,. 10.1016/j.elspec.2004.03.004
- G. Silversmit, D. Depla, H. Poelman, G. B. Marin, and R. De Gryse, J. Electron Spectrosc. Relat. Phenom. 0368-2048, 135, 167 (2004). 10.1016/j.elspec.2004.03.004
- (2004) J. Electron Spectrosc. Relat. Phenom. , vol.135 , pp. 167
- Silversmit, G.¹ Depla, D.² Poelman, H.³ Marin, G.B.⁴ De Gryse, R.⁵

20
- 0344034683
- 0167-2738,. 10.1016/j.ssi.2003.08.022
- S. -H. Lee, H. M. Cheong, M. J. Seong, P. Liu, C. E. Tracy, A. Mascarenhas, J. R. Pitts, and S. K. Deb, Solid State Ionics 0167-2738, 165, 111 (2003). 10.1016/j.ssi.2003.08.022
- (2003) Solid State Ionics , vol.165 , pp. 111
- Lee, S.-H.¹ Cheong, H.M.² Seong, M.J.³ Liu, P.⁴ Tracy, C.E.⁵ Mascarenhas, A.⁶ Pitts, J.R.⁷ Deb, S.K.⁸

21
- 0037123498
- 0169-4332,. 10.1016/S0169-4332(02)00180-0
- Y. Ningyi, L. Jinhua, and L. Chenglu, Appl. Surf. Sci. 0169-4332, 191, 176 (2002). 10.1016/S0169-4332(02)00180-0
- (2002) Appl. Surf. Sci. , vol.191 , pp. 176
- Ningyi, Y.¹ Jinhua, L.² Chenglu, L.³

22
- 42949111581
- 0040-6090,. 10.1016/j.tsf.2007.08.113
- S. Beke, S. Giorgio, L. Körösi, L. Nanái, and W. Marine, Thin Solid Films 0040-6090, 516, 4659 (2008). 10.1016/j.tsf.2007.08.113
- (2008) Thin Solid Films , vol.516 , pp. 4659
- Beke, S.¹ Giorgio, S.² Körösi, L.³ Nanái, L.⁴ Marine, W.⁵

23
- 1842584267
- 0013-4651,. 10.1149/1.1641037
- A. Mantoux, H. Groult, E. Balnois, P. Doppelt, and L. Gueroudji, J. Electrochem. Soc. 0013-4651, 151, A368 (2004). 10.1149/1.1641037
- (2004) J. Electrochem. Soc. , vol.151 , pp. 368
- Mantoux, A.¹ Groult, H.² Balnois, E.³ Doppelt, P.⁴ Gueroudji, L.⁵

24
- 49149124418
- 0013-4651,. 10.1149/1.2955724
- Q. Xie, J. Musschoot, D. Deduytsche, R. L. Van Meirhaeghe, C. Detavernier, S. Van den Berghe, Y. -L. Jiang, G. -P. Ru, B. -Z. Li, and X. -P. Qu, J. Electrochem. Soc. 0013-4651, 155, H688 (2008). 10.1149/1.2955724
- (2008) J. Electrochem. Soc. , vol.155 , pp. 688
- Xie, Q.¹ Musschoot, J.² Deduytsche, D.³ Van Meirhaeghe, R.L.⁴ Detavernier, C.⁵ Van Den Berghe, S.⁶ Jiang, Y.-L.⁷ Ru, G.-P.⁸ Li, B.-Z.⁹ Qu, X.-P.¹⁰

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