ALE growth of transparent conductors

Materials Research Society Symposium - Proceedings

Volumn 426, Issue , 1996, Pages 513-518

  Ritala, Mikko ^a   Asikainen, Timo ^a   Leskela, Markku ^a   Skarp, Jarmo ^a  

^a UNIVERSITY OF HELSINKI   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

CONDUCTIVE FILMS; DEPOSITION; ELECTRIC CONDUCTIVITY OF SOLIDS; EPITAXIAL GROWTH; FILM GROWTH; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTING ZINC COMPOUNDS; SOLAR CELLS; THIN FILMS; TRANSPARENCY; ZINC OXIDE;

ATOMIC LAYER EPITAXY (ALE); TRANSPARENT CONDUCTING THIN FILMS;

SEMICONDUCTING FILMS;

EID: 0030405306     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)