Viscous flow reactor with quartz crystal microbalance for thin film growth by atomic layer deposition

Review of Scientific Instruments

Volumn 73, Issue 8, 2002, Pages 2981-

  Elam, J W ^a   Groner, M D ^a   George, S M ^a  

^a UNIVERSITY OF COLORADO   (United States)

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Indexed keywords

EID: 0036685058     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1490410     Document Type: Article

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