Advanced ALE processes of amorphous and polycrystalline films

Applied Surface Science

Volumn 112, Issue , 1997, Pages 223-230

  Ritala, Mikko ^a  

^a UNIVERSITY OF HELSINKI   (Finland)

Author keywords

Amorphous thin films; Atomic layer epitaxy (ALE); Polycrystalline thin films; Review

Indexed keywords

AMORPHOUS FILMS; DEPOSITION; DIELECTRIC FILMS; LOW TEMPERATURE OPERATIONS; NANOSTRUCTURED MATERIALS; NITROGEN COMPOUNDS; OPTICAL MULTILAYERS; POLYCRYSTALLINE MATERIALS; SOLID SOLUTIONS; SUBSTITUTION REACTIONS; SURFACE PHENOMENA; THIN FILMS;

ATOMIC LAYER EPITAXY; NANOLAMINATE DIELECTRICS; REDUCING AGENT;

EPITAXIAL GROWTH;

EID: 0031546895     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(96)01004-5     Document Type: Article

References (43)

1. T. Suntola, J. Antson, A. Pakkala and S. Lindfors, SID 1980 Digest (1980) 108.
2. T. Suntola, Mater. Sci. Rep. 4 (1989) 261.
3. T. Suntola, Thin Solid Films 216 (1992) 84.
4. L. Niinistö, ed., Proc. of the 1st Int. Symp. on Atomic Layer Epitaxy, Acta Polytech. Scand., Ser. Chem. Technol. 195 (1990).
5. S.M. Bedair, ed., Proc. of the 2nd Int. Symp. on Atomic Layer Epitaxy, Thin Solid Films 225 (1993).
6. M. Ozeki, A. Usui, Y. Aoyagi, Y. and J. Nishizawa, eds., Proc. of the 3rd Int. Symp. on Atomic Layer Epitaxy, Appl. Surf. Sci. 82-83 (1994).
7. M. Leskelä and L. Niinistö, in: Atomic Layer Epitaxy, eds. T. Suntola and M. Simpson (Blackie and Son Ltd., Glasgow, 1990) p. 1.
8. T. Suntola, in: Handbook of Crystal Growth, ed. D.T.J. Hurle, Vol. 3b (Elsevier, Amsterdam, 1994) p. 601.
9. M. Leskelä and M. Ritala, J. Phys. IV 5 (1995) C5-937.
10. L. Niinistö, M. Ritala and M. Leskelä, Mater. Sci. Eng. B 41 (1996) 23.
11. M. Ritala, T. Asikainen, M. Leskelä and J. Skarp, Mater. Res. Soc. Symp. Proc., in press.
12. M. Leskelä and L. Niinistö, Proc. 6th Int. Workshop on Electroluminescence, El Paso (1992) p. 249.
13. L. Niinistö and M. Leskelä, Appl. Surf. Sci. 82-83 (1994) 454.
14. G. Härkönen, M. Leppänen, E. Soininen, R. Törnqvist and J. Viljanen, J. Alloys Comp. 225 (1995) 552.
15. G. Härkönen, K. Härkönen and R. Törnqvist, SID 1990 Digest (1990) 232.
16. E. Soininen, M. Leppänen and A. Pakkala, Proc. Eurodisplay '93 (1993) 233.
17. J. Haaranen, R. Törnqvist, J. Koponen, T. Pitkänen, M. Surma-aho, W. Barrow and C. Laakso, SID 1992 Digest (1992) 348.
18. W. Barrow, R. Coovert, E. Dickey, T. Flegal, M. Fullman, C. King and C. Laakso, Conf. Record of the 1994 Int. Display Res. Conf. (1994) 448.
19. Y.A. Ono, Electroluminescent Displays, Series on Information Display, Vol. 1 (World Scientific, Singapore, 1995).
20. T. Suntola, MRS Bull. Oct. (1993) 45.
21. A. Rautiainen, Y. Koskinen, J. Skarp and S. Lindfors, Mater. Res. Soc. Symp. Proc. 222 (1991) 263.
22. A. Kytökivi, Y. Koskinen, A. Rautiainen and J. Skarp, Mater. Res. Soc. Symp. Proc. 222 (1991) 269.
23. E. Siponmaa, J. Sarlund, M. Ritala and M. Leskelä, Proc. 13th Eur. Photov. Solar Energy Conf., Nice (1995) p. 1658.
24. J.D. Ouwens, R.E.I. Schropp, J. Wallinga, W.F. van der Weg, M. Ritala, M. Leskelä and J. Hyvärinen, Proc. 12th Eur. Photov. Solar Energy Conf., Amsterdam (1994) p. 1296.
25. V. Lujala, J. Skarp, M. Tammenmaa and T. Suntola, Appl. Surf. Sci. 82-83 (1994) 34.
26. V. Lujala, J. Skarp, M. Tammenmaa, T. Suntola and J. Wallinga, Proc. 12th Eur. Photov. Solar Energy Conf., Amsterdam (1994) p. 1511.
27. L. Stolt, J. Hedström and J. Skarp, IEEE 1st World Conf. Photov. Energy Conv., Havaii (1994) p. 250.
28. E.-L. Lakomaa, Appl. Surf. Sci. 75 (1994) 185.
29. S. Haukka, E.-L. Lakomaa and A. Root, J. Phys. Chem. 97 (1993) 5085.
30. S. Haukka, E.-L. Lakomaa, O. Jylhä, J. Vilhunen and S. Hornytzkyj, Langmuir 9 (1993) 3497.
31. C. Dücsö, N.Q. Khanh, Z. Horváth, I. Barsony, M. Utriainen, S. Lehto, M. Nieminen and L. Niinistö, J. Electrochem. Soc. 143 (1996) 683.
32. K.-E. Elers, private communication (1996).
33. K. Kukli, M. Ritala and M. Leskelä, J. Electrochem. Soc. 142 (1995) 1671.
34. J. Antson, SID 1982 Digest (1982) 124.
35. J. Skarp, Finnish Pat. 64,878 (1983).
36. H. Kattelus, M. Ylilammi, J. Salmi, T. Ranta-aho, E. Nykänen and I. Suni, Mater. Res. Soc. Symp. Proc. 284 (1993) 511.
37. K. Kukli, J. Ihanus, M. Ritala and M. Leskelä, Appl. Phys. Lett. 68 (1996) 3737.
38. K. Kukli, J. Ihanus, M. Ritala and M. Leskelä, J. Electrochem. Soc., in press.
39. D. Riihelä, M. Ritala, R. Matero and M. Leskelä, Thin Solid Films, 289 (1996) 250.
40. K.-E. Elers, M. Ritala, M. Leskelä and E. Rauhala, Appl. Surf. Sci. 82-83 (1994) 468.
41. M. Ritala, M. Leskelä, E. Rauhala and P. Haussalo, J. Electrochem. Soc. 142 (1995) 2731.
42. R.I. Hegde, R.W. Fiordalice, E.O. Travis and P.J. Tobin, J. Vac. Sci. Technol. B 11 (1993) 1287, and references therein.
43. J. Ihanus, M. Ritala, M. Leskelä and E. Rauhala, Appl. Surf. Sci., this issue.