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Journal of Materials Chemistry

Volumn 10, Issue 8, 2000, Pages 1857-1861

Enhanced growth rate in atomic layer epitaxy deposition of magnesium oxide thin films

(3) Putkonen, M a Sajavaara, T a Niinisto, L a

a AALTO UNIVERSITY (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

BIS(CYCLOPENTADIENYL)MAGNESIUM; CALCIUM OXIDE; HYDROGEN PEROXIDE; MAGNESIUM OXIDE; OZONE; UNCLASSIFIED DRUG; WATER;

ARTICLE; ATOMIC FORCE MICROSCOPY; CRYSTAL; FILM; GROWTH RATE; STOICHIOMETRY; X RAY DIFFRACTION;

EID: 0033847492 PISSN: 09599428 EISSN: None Source Type: Journal
DOI: 10.1039/b000643m Document Type: Article

Times cited : (74)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.