Integrated microcantilevers for high-resolution sensing and probing

Measurement Science and Technology

Volumn 23, Issue 2, 2012, Pages

  Li, Xinxin ^a   Lee, Dong Weon ^b  

^a INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

^b Chonnam National University   (South Korea)

Author keywords

integrated cantilever; micro sensor; nano tip based instrument; resonance mode; scanning probe microscopy; surface stress

Indexed keywords

CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; DIGITAL STORAGE; MICROSENSORS; NANOSENSORS; NANOTIPS; SCANNING PROBE MICROSCOPY; SURFACE ANALYSIS; SURFACE PROPERTIES; SURFACE REACTIONS; SURFACE TREATMENT;

HIGH-THROUGHPUT IMAGING; INTEGRATED CANTILEVER; NANO-TIP BASED INSTRUMENTS; PARALLEL OPERATIONS; RESONANCE MODE; SELF-SENSING AND SELF-ACTUATING; SURFACE STRESS; SURFACE STRESS DETECTION;

NANOCANTILEVERS;

EID: 84862969069     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/23/2/022001     Document Type: Review

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