Micro/nano-heater integrated cantilevers for micro/nano-lithography applications

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 1041-1044

  Lee, Dong Weon ^a   Oh, Il Kwon ^a  

^a Chonnam National University   (South Korea)

Author keywords

Cantilever; Lithography; Micro nano heater; Scanning probe microscope

Indexed keywords

ELECTRIC LOAD FLOW; SCANNING PROBE MICROSCOPY; SILICON WAFERS; SPIN COATING;

INTEGRATED CANTILEVERS; MICROHEATERS; NANOHEATERS; THERMAL CANTILEVERS;

NANOLITHOGRAPHY;

ELECTRIC CURRENT; LITHOGRAPHY; SILICON;

EID: 34247897141     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.104     Document Type: Article

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