Sensor nanofabrication, performance, and conduction mechanisms in scanning thermal microscopy

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 2, 1997, Pages 349-360

  Luo, K ^a   Shi, Z ^a   Varesi, J ^a   Majumdar, A ^a,b  

^a University of California   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; FILMS; HEAT CONDUCTION; HEAT RESISTANCE; MATHEMATICAL MODELS; MICROSCOPIC EXAMINATION; NANOTECHNOLOGY; PERFORMANCE; SURFACES; THERMAL VARIABLES MEASUREMENT;

ELECTRICAL TIME CONSTANT; LIQUID FILMS; SCANNING THERMAL MICROSCOPY; THERMAL TIME CONSTANT;

THERMOCOUPLES;

EID: 0031102074     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589319     Document Type: Article

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