Generic scanned-probe microscope sensors by combined micromachining and electron-beam lithography

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 1, 1998, Pages 54-58

  Zhou, H ^a   Midha, A ^a   Mills, G ^a   Thorns, S ^a   Murad, S K ^a   Weaver, J M R ^a  

^a UNIVERSITY OF GLASGOW   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAM LITHOGRAPHY; ETCHING; FABRICATION; MICROMACHINING; MICROSCOPES; PROBES; SUBSTRATES; THERMOCOUPLES;

ATOMIC FORCE MICROSCOPE; DIRECT WRITE ELECTRON BEAM LITHOGRAPHY; OPTICAL PROBES; SCANNED PROBE MICROSCOPE SENSORS;

OPTICAL SENSORS;

EID: 0031683807     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589835     Document Type: Article

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