Mechanical behavior of ultrathin microcantilever

Sensors and Actuators, A: Physical

Volumn 82, Issue 1, 2000, Pages 102-107

  Yang, Jinling ^a   Ono, Takahito ^a   Esashi, Masayoshi ^b  

^a TOHOKU UNIVERSITY   (Japan)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER BEAMS; NATURAL FREQUENCIES; Q FACTOR MEASUREMENT; SENSITIVITY ANALYSIS; SILICON WAFERS; SINGLE CRYSTALS; ULTRATHIN FILMS;

MULTIMODE RESONANCES; ULTRATHIN MICROCANTILEVERS;

SILICON SENSORS;

EID: 0033732621     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00319-2     Document Type: Article

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