Multiple-input microcantilever sensors

Ultramicroscopy

Volumn 82, Issue 1-4, 2000, Pages 17-21

  Britton Jr , C L ^a,b   Jones, R L ^a,b   Oden, P I ^a,b   Hu, Z ^a,b   Warmack, R J ^a,b   Smith, S F ^a,b   Bryan, W L ^a,b   Rochelle, J M ^a,b  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF TENNESSEE   (United States)

Author keywords

Absorption induced stress; Microcantilever; Multiple input chemical sensing

Indexed keywords

ABSORPTION; HYDROGEN; INTEGRATED CIRCUIT LAYOUT; MERCURY (METAL); MICROELECTROMECHANICAL DEVICES; MICROSENSORS; READOUT SYSTEMS; TELEMETERING; VAPORS;

ABSORPTION-INDUCED STRESSES; MICROCANTILEVER SENSORS;

CHEMICAL SENSORS;

HYDROGEN; MERCURY;

ARTICLE; CHEMOSENSITIVITY; SENSOR; STRESS; TELEMETRY; VALIDATION PROCESS; VAPOR;

EID: 0343415652     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3991(99)00155-2     Document Type: Article

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