Functional microcantilever for a novel scanning force microscope

Journal of the Korean Physical Society

Volumn 52, Issue 5, 2008, Pages 1496-1500

  Lee, Dong Weon ^a   Wetzel, Adrian ^b   Meyer, Ernst ^b  

^a Chonnam National University   (South Korea)

^b UNIVERSITY OF BASEL   (Switzerland)

Author keywords

Chemical atomic force microscope; Scanning probe microscope; Time of flight mass spectrometer

Indexed keywords

EID: 44649091233     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: 10.3938/jkps.52.1496     Document Type: Article

References (17)

1. J. Spence, U. Weierstall and W. Lo, J. Vac. Sci. Technol. B 14, 1587 (1996).
2. U. Weierstall and J. Spence, Surf. Sci. 398, 267 (1998).
3. T. Shimizu, J.-T. Kim and H. Tokumoto, Appl. Phys. A: Mater. Sci. Process. 66, 771 (1998).
4. T. Shimizu and H. Tokumoto, Jpn. J. Appl. Phys., Part 1 38, 3860 (1999).
5. A. Fian, C. Ernst and M. Leisch, Fresenius, J. Anal. Chem. 365, 38 (1999).
6. M. Tortonese, R. C. Barrett and C. F. Quate, Appl. Phys. Lett. 62, 835 (1993).
7. R. S. Chambers and G. Ehrlich, J. Vac. Sci. Technol. B 13, 273 (1976).
8. O. Nishikawa, K. Kurihara, M. Nachi, M. Konishi and M. Wada, Rev. Sci. Instrum. 52, 810 (1981).
9. M. K. Miller, A. Cerezo, M. G. Hetherington and G. D. W. Smith, Atom Probe Field Ion Microscopy (Clarendon Press, Oxford, 1996).
10. E. W. Mueller and T. Sakurai, J. Vac. Sci. Technol. B 11, 878 (1974).
11. J. A. Panitz, Prog. Surf. Sci. 8, 219 (1978).
12. A. Crezo, T. J. Godfry and G. D. W. Smith, Rev. Sci. Instrum. 59, 862 (1988).
13. M. K. Miller, Surf. Sci. 246, 428 (1991).
14. O. Nishikawa, M. Kimoto, M. Iwatsuki and Y. Ishikawa, J. Vac. Sci. Technol. B 13, 599 (1995).
15. A. Wetzel, A. Socoliuc, E. Meyer, R. Bennewitza, E. Gnecco and C. Gerber, Rev. Sci. Instrum. 78, 103701-1 (2005).
16. D. Lee, A. Wetzel, R. Bennewitz, E. Meyer, M. Despont, P. Vettiger and C. Gerber, Microelectron. Eng. 67-68, 635 (2003).
17. D. Lee, A. Wetzel, R. Bennewitz, E. Meyer, M. Despont, P. Vettiger and C. Gerber, Appl. Phys. Lett. 84, 1558 (2004).