Modeling and optimal design of piezoelectric cantilever microactuators

Journal of Microelectromechanical Systems

Volumn 6, Issue 3, 1997, Pages 266-270

  DeVoe, Don L ^a,c,d,e   Pisano, Albert P ^{b,d,f,g,h,i,j}  

^a UNIVERSITY OF MARYLAND   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c UNIVERSITY OF MARYLAND   (United States)

^d UNIVERSITY OF CALIFORNIA   (United States)

^e UMCP   (United States)

^f Howard Hughes Medical Institute   (United States)

^g PALO ALTO RESEARCH CENTER   (United States)

^h Department of Mechanical Engineering ^*  (United States)

ⁱ GENERAL MOTORS CORPORATION   (United States)

^j NORTHROP GRUMMAN CORPORATION   (United States)

more..

Author keywords

Actuator; Bimorph; Cantilever; Model; Piezoelectric; ZnO

Indexed keywords

FABRICATION; MATHEMATICAL MODELS; MECHANICAL VARIABLES MEASUREMENT; MICROMACHINING; OPTIMIZATION; PIEZOELECTRIC DEVICES; ZINC OXIDE;

PIEZOELECTRIC CANTILEVER MICROACTUATORS; SURFACE MICROMACHINING;

ACTUATORS;

EID: 0031235285     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.623116     Document Type: Article

References (7)

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3. J. G. Smits and W.-S. Choi, "The constituent equations of piezoelectric heterogeneous bimorphs," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 38, no. 3, pp. 256-270, 1991.
4. J. G. Smits and A. Ballato, "Dynamic admittance matrix of piezoelectric cantilever bimorphs," IEEE J. Microelectromech. Syst., vol. 3, no. 3, pp. 105-111, 1994.
5. IEEE Standard on Piezoelectricity, ANSI/IEEE Standard 176-1987.
6. S. Akamine, T. R. Albrecht, M. J. Zdeblick, and C. F. Quate, "A planar process for microfabrication of a scanning tunneling microscope," Sens. Actuators, vol. A23, no. 3, pp. 964-70, 1990.
7. F. R. Blom et al., "Thin-film ZnO as micromechanical actuator at low frequencies," Sens. Actuators, vol. A21, no. 1, pp. 226-228, 1990.