![]() |
Volumn 6, Issue 3, 1997, Pages 266-270
|
Modeling and optimal design of piezoelectric cantilever microactuators
a,c,d,e
e
UMCP
(United States)
|
Author keywords
Actuator; Bimorph; Cantilever; Model; Piezoelectric; ZnO
|
Indexed keywords
FABRICATION;
MATHEMATICAL MODELS;
MECHANICAL VARIABLES MEASUREMENT;
MICROMACHINING;
OPTIMIZATION;
PIEZOELECTRIC DEVICES;
ZINC OXIDE;
PIEZOELECTRIC CANTILEVER MICROACTUATORS;
SURFACE MICROMACHINING;
ACTUATORS;
|
EID: 0031235285
PISSN: 10577157
EISSN: None
Source Type: Journal
DOI: 10.1109/84.623116 Document Type: Article |
Times cited : (317)
|
References (7)
|