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Volumn 6, Issue 3, 1997, Pages 266-270

Modeling and optimal design of piezoelectric cantilever microactuators

Author keywords

Actuator; Bimorph; Cantilever; Model; Piezoelectric; ZnO

Indexed keywords

FABRICATION; MATHEMATICAL MODELS; MECHANICAL VARIABLES MEASUREMENT; MICROMACHINING; OPTIMIZATION; PIEZOELECTRIC DEVICES; ZINC OXIDE;

EID: 0031235285     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.623116     Document Type: Article
Times cited : (317)

References (7)
  • 1
    • 0001764380 scopus 로고
    • Analysis of bi-metal thermostats
    • S. Timoshenko, "Analysis of bi-metal thermostats," J. Optic. Soc. Am. Rev. Sci. Inst., vol. 11, no. 3, pp. 233-56, 1925.
    • (1925) J. Optic. Soc. Am. Rev. Sci. Inst. , vol.11 , Issue.3 , pp. 233-256
    • Timoshenko, S.1
  • 2
    • 0027565639 scopus 로고
    • Analysis of tip deflection and force of a bimetallic cantilever microactuator
    • W.-H. Chu, M. Mehregany, and R. L. Mullen, "Analysis of tip deflection and force of a bimetallic cantilever microactuator," J. Micromech. Microeng., vol. 3, no. 1, pp. 4-7, 1993.
    • (1993) J. Micromech. Microeng. , vol.3 , Issue.1 , pp. 4-7
    • Chu, W.-H.1    Mehregany, M.2    Mullen, R.L.3
  • 3
    • 0026153176 scopus 로고
    • The constituent equations of piezoelectric heterogeneous bimorphs
    • J. G. Smits and W.-S. Choi, "The constituent equations of piezoelectric heterogeneous bimorphs," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 38, no. 3, pp. 256-270, 1991.
    • (1991) IEEE Trans. Ultrason., Ferroelect., Freq. Contr. , vol.38 , Issue.3 , pp. 256-270
    • Smits, J.G.1    Choi, W.-S.2
  • 4
    • 0028515051 scopus 로고
    • Dynamic admittance matrix of piezoelectric cantilever bimorphs
    • J. G. Smits and A. Ballato, "Dynamic admittance matrix of piezoelectric cantilever bimorphs," IEEE J. Microelectromech. Syst., vol. 3, no. 3, pp. 105-111, 1994.
    • (1994) IEEE J. Microelectromech. Syst. , vol.3 , Issue.3 , pp. 105-111
    • Smits, J.G.1    Ballato, A.2
  • 6
    • 0025416525 scopus 로고
    • A planar process for microfabrication of a scanning tunneling microscope
    • S. Akamine, T. R. Albrecht, M. J. Zdeblick, and C. F. Quate, "A planar process for microfabrication of a scanning tunneling microscope," Sens. Actuators, vol. A23, no. 3, pp. 964-70, 1990.
    • (1990) Sens. Actuators , vol.A23 , Issue.3 , pp. 964-970
    • Akamine, S.1    Albrecht, T.R.2    Zdeblick, M.J.3    Quate, C.F.4
  • 7
    • 0025698085 scopus 로고
    • Thin-film ZnO as micromechanical actuator at low frequencies
    • F. R. Blom et al., "Thin-film ZnO as micromechanical actuator at low frequencies," Sens. Actuators, vol. A21, no. 1, pp. 226-228, 1990.
    • (1990) Sens. Actuators , vol.A21 , Issue.1 , pp. 226-228
    • Blom, F.R.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.