Microprobe array with electrical interconnection for thermal imaging and data storage

Journal of Microelectromechanical Systems

Volumn 11, Issue 3, 2002, Pages 215-221

  Lee, Dong Weon ^a   Ono, Takahito ^a   Abe, Takashi ^a   Esashi, Masayoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Data storage; Electrical interconnection; Microprobe; Nano heater; Thermal imaging

Indexed keywords

DIGITAL STORAGE; DRY ETCHING; INFRARED IMAGING; MICROACTUATORS; MICROMACHINING; MICROPROCESSOR CHIPS; SEMICONDUCTING SILICON; THERMOCOUPLES;

MICROPROBE ARRAYS;

MICROELECTROMECHANICAL DEVICES;

EID: 0036601154     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2002.1007400     Document Type: Article

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