Ultrahigh density, high-data-rate NEMS-based AFM data storage system

Microelectronic Engineering

Volumn 46, Issue 1, 1999, Pages 11-17

  Vettiger, P ^a   Brugger, J ^a   Despont, M ^a   Drechsler, U ^a   Durig U ^a   Haberle W ^a   Lutwyche, M ^a   Rothuizen, H ^a   Stutz, R ^a   Widmer, R ^a   Binnig, G ^a  

^a IBM RESEARCH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTROMECHANICAL DEVICES; MICROPROCESSOR CHIPS; NANOTECHNOLOGY; PARALLEL PROCESSING SYSTEMS; PLASTIC FILMS; POLYMETHYL METHACRYLATES; STORAGE ALLOCATION (COMPUTER); THERMOMECHANICAL TREATMENT; VLSI CIRCUITS;

NANOELECTROMECHANICAL SYSTEMS (NEMS);

DATA STORAGE EQUIPMENT;

EID: 0033132598     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(99)00006-4     Document Type: Article

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