Fabrication of microprobe array with sub-100nm nano-heater for nanometric thermal imaging and data storage

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 204-207

  Lee, D W ^a   Ono, T ^a   Abe, T ^a   Esashi, M ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DATA STORAGE EQUIPMENT; ETCHING; INFRARED IMAGING; LOW TEMPERATURE EFFECTS; OXIDATION; PROBES;

MICROPROBE ARRAYS; NANO-HEATERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0035019080     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)