메뉴 건너뛰기




Volumn 439, Issue 7077, 2006, Pages 703-706

Electronic transport in nanometre-scale silicon-on-insulator membranes

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC INSULATORS; ELECTRONIC PROPERTIES; PHYSICAL PROPERTIES; SCANNING TUNNELING MICROSCOPY; SILICA; SILICON ON INSULATOR TECHNOLOGY; THERMODYNAMICS;

EID: 32544460869     PISSN: 00280836     EISSN: 14764687     Source Type: Journal    
DOI: 10.1038/nature04501     Document Type: Article
Times cited : (180)

References (28)
  • 2
    • 0001180628 scopus 로고    scopus 로고
    • Formation of silicon islands on a silicon on insulator substrate upon thermal annealing
    • Legrand, B., Agache, V., Nys, J. P., Senez, V. & Stievenard, D. Formation of silicon islands on a silicon on insulator substrate upon thermal annealing. Appl. Phys. Lett. 76, 3271-3273 (2000).
    • (2000) Appl. Phys. Lett. , vol.76 , pp. 3271-3273
    • Legrand, B.1    Agache, V.2    Nys, J.P.3    Senez, V.4    Stievenard, D.5
  • 3
    • 2942606508 scopus 로고    scopus 로고
    • Phonon-boundary scattering in ultrathin single-crystal silicon layers
    • Liu, W. & Asheghi, M. Phonon-boundary scattering in ultrathin single-crystal silicon layers. Appl. Phys. Lett. 84, 3819-3821 (2004).
    • (2004) Appl. Phys. Lett. , vol.84 , pp. 3819-3821
    • Liu, W.1    Asheghi, M.2
  • 4
    • 0842328007 scopus 로고    scopus 로고
    • Nanostressors and the nanomechanical response of a thin silicon film on an insulator
    • Liu, F., Huang, M. H., Rugheimer, P. P., Savage, D. E. & Lagally, M. G. Nanostressors and the nanomechanical response of a thin silicon film on an insulator. Phys. Rev. Lett. 89, 136101 (2002).
    • (2002) Phys. Rev. Lett. , vol.89 , pp. 136101
    • Liu, F.1    Huang, M.H.2    Rugheimer, P.P.3    Savage, D.E.4    Lagally, M.G.5
  • 5
    • 0037566742 scopus 로고    scopus 로고
    • Frontiers of silicon-on-insulator
    • Celler, G. K. & Cristoloveanu, S. Frontiers of silicon-on-insulator. J. Appl. Phys. 93, 4955-4978 (2003).
    • (2003) J. Appl. Phys. , vol.93 , pp. 4955-4978
    • Celler, G.K.1    Cristoloveanu, S.2
  • 6
    • 0002897344 scopus 로고    scopus 로고
    • A 0.25 mm 600MHz 1.5V SOI 64b ALPHATM microprocessor
    • Kim, Y. A 0.25 mm 600MHz 1.5V SOI 64b ALPHATM microprocessor. ISSCC Dig. Tech. Pap. I, 432-433 (1999).
    • (1999) ISSCC Dig. Tech. Pap. , vol.1 , pp. 432-433
    • Kim, Y.1
  • 7
    • 0026896303 scopus 로고
    • Scaling the Si MOSFET - From bulk to SOI to bulk
    • Yan, R. H., Ourmazd, A. & Lee, K. F. Scaling the Si MOSFET - From bulk to SOI to bulk. IEEE. Trans. Electron. Dev. 39, 1704-1710 (1992).
    • (1992) IEEE. Trans. Electron. Dev. , vol.39 , pp. 1704-1710
    • Yan, R.H.1    Ourmazd, A.2    Lee, K.F.3
  • 8
    • 8644262396 scopus 로고    scopus 로고
    • Scanning tunneling microscopy on ultrathin silicon on insulator (100)
    • Sutter, P., Ernst, W. & Sutter, E. Scanning tunneling microscopy on ultrathin silicon on insulator (100). Appl. Phys. Lett. 85, 3148-3150 (2004).
    • (2004) Appl. Phys. Lett. , vol.85 , pp. 3148-3150
    • Sutter, P.1    Ernst, W.2    Sutter, E.3
  • 10
    • 25744440508 scopus 로고    scopus 로고
    • Status of 300 mm SOI material: Comparisons with 200 mm
    • Hovel, H. et al. Status of 300 mm SOI material: comparisons with 200 mm. Proc. Electrochem. Soc. 2003-05, 75-80 (2003).
    • (2003) Proc. Electrochem. Soc. , vol.2003 , Issue.5 , pp. 75-80
    • Hovel, H.1
  • 12
    • 0000740354 scopus 로고
    • Si(001) dimer structure observed with scanning tunneling microscopy
    • Tromp, R. M., Hamers, R. J. & Demuth, J. E. Si(001) dimer structure observed with scanning tunneling microscopy. Phys. Rev. Lett. 55, 1303-1306 (1985).
    • (1985) Phys. Rev. Lett. , vol.55 , pp. 1303-1306
    • Tromp, R.M.1    Hamers, R.J.2    Demuth, J.E.3
  • 13
    • 4243300887 scopus 로고
    • Direct measurement of the asymmetric dimer buckling of Ge on Si(001)
    • Fontes, E., Patel, J. R. & Comin, F. Direct measurement of the asymmetric dimer buckling of Ge on Si(001). Phys. Rev. Lett. 70, 2790-2793 (1993).
    • (1993) Phys. Rev. Lett. , vol.70 , pp. 2790-2793
    • Fontes, E.1    Patel, J.R.2    Comin, F.3
  • 15
    • 0022600166 scopus 로고
    • Simple technique for separating the effects of interface traps and trapped-oxide charge in metal-oxide-scmiconductor transistors
    • McWhorter, P. J. & Winokur, P. S. Simple technique for separating the effects of interface traps and trapped-oxide charge in metal-oxide- scmiconductor transistors. Appl. Phys. Lett. 48, 133-135 (1986).
    • (1986) Appl. Phys. Lett. , vol.48 , pp. 133-135
    • McWhorter, P.J.1    Winokur, P.S.2
  • 17
    • 0001132890 scopus 로고
    • Electronic structure of Si(100)C(4x2) calculated within the GW approximation
    • Northrup, J. E. Electronic structure of Si(100)C(4x2) calculated within the GW approximation. Phys. Rev. B 47, 10032-10035 (1993).
    • (1993) Phys. Rev. B , vol.47 , pp. 10032-10035
    • Northrup, J.E.1
  • 18
    • 4043170817 scopus 로고
    • Long-range quasielastic scattering of low-energy electrons by conduction-band surface-plasmons on Si(111)7x7
    • Stroscio, J. A. & Ho, W. Long-range quasielastic scattering of low-energy electrons by conduction-band surface-plasmons on Si(111)7x7. Phys. Rev. Lett. 54, 1573-1576 (1985).
    • (1985) Phys. Rev. Lett. , vol.54 , pp. 1573-1576
    • Stroscio, J.A.1    Ho, W.2
  • 19
    • 0000530291 scopus 로고    scopus 로고
    • Electron conduction through surface states of the Si(111)-(7x7) surface
    • Heike, S., Watanabe, S., Wada, Y. & Hashizume, T. Electron conduction through surface states of the Si(111)-(7x7) surface. Phys. Rev. Lett. 81, 890-893 (1998).
    • (1998) Phys. Rev. Lett. , vol.81 , pp. 890-893
    • Heike, S.1    Watanabe, S.2    Wada, Y.3    Hashizume, T.4
  • 20
    • 3543116091 scopus 로고    scopus 로고
    • Surface-state electrical conductivity at a metal-insulator transition on silicon
    • Tanikawa, T., Matsuda, I., Kanagawa, T. & Hasegawa, S. Surface-state electrical conductivity at a metal-insulator transition on silicon. Phys. Rev. Lett. 93, 016801 (2004).
    • (2004) Phys. Rev. Lett. , vol.93 , pp. 016801
    • Tanikawa, T.1    Matsuda, I.2    Kanagawa, T.3    Hasegawa, S.4
  • 21
    • 0038488842 scopus 로고    scopus 로고
    • Micro-four-point probe for studying electronic transport through surface states
    • Petersen, C. L., Grey, F., Shiraki, I. & Hasegawa, S. Micro-four-point probe for studying electronic transport through surface states. Appl. Phys. Lett. 77, 3782-3784 (2000).
    • (2000) Appl. Phys. Lett. , vol.77 , pp. 3782-3784
    • Petersen, C.L.1    Grey, F.2    Shiraki, I.3    Hasegawa, S.4
  • 22
    • 0037087976 scopus 로고    scopus 로고
    • Electrical conductance of reconstructed silicon surfaces
    • Yoo, K. & Weitering, H. H. Electrical conductance of reconstructed silicon surfaces. Phys. Rev: B 65, 115424 (2002).
    • (2002) Phys. Rev: B , vol.65 , pp. 115424
    • Yoo, K.1    Weitering, H.H.2
  • 23
    • 0037091424 scopus 로고    scopus 로고
    • Chemisorption-induced disruption of surface electronic structure: Hydrogen adsorption on the Si(100)-2x1 surface
    • Chen, D. X. & Boland, J. J. Chemisorption-induced disruption of surface electronic structure: Hydrogen adsorption on the Si(100)-2x1 surface. Phys. Rev. B 65, 165336 (2002).
    • (2002) Phys. Rev. B , vol.65 , pp. 165336
    • Chen, D.X.1    Boland, J.J.2
  • 24
    • 42749098775 scopus 로고    scopus 로고
    • Spontaneous roughening of low-coverage Si(100)-2x1: Cl surfaces: Patch formation on submonolayer halogenated surface
    • Chen, D. X. & Boland, J. J. Spontaneous roughening of low-coverage Si(100)-2x1: Cl surfaces: Patch formation on submonolayer halogenated surface. Phys. Rev. B 70, 205432 (2004).
    • (2004) Phys. Rev. B , vol.70 , pp. 205432
    • Chen, D.X.1    Boland, J.J.2
  • 25
    • 0020115363 scopus 로고
    • Oxygen chemisorption and oxide formation on Si(111) and Si(100) surfaces
    • Hollinger, G. & Himpsel, F. J. Oxygen chemisorption and oxide formation on Si(111) and Si(100) surfaces. J. Vac. Sci. Technol. A 1, 640-645 (1983).
    • (1983) J. Vac. Sci. Technol. A , vol.1 , pp. 640-645
    • Hollinger, G.1    Himpsel, F.J.2
  • 26
    • 0033807301 scopus 로고    scopus 로고
    • Cycloaddition chemistry of organic molecules with semiconductor surfaces
    • Hamers, R. J. et al. Cycloaddition chemistry of organic molecules with semiconductor surfaces. Acc. Chem. Res. 33, 617-624 (2000).
    • (2000) Acc. Chem. Res. , vol.33 , pp. 617-624
    • Hamers, R.J.1
  • 27
    • 42749101750 scopus 로고    scopus 로고
    • Organic modification of surface electronic properties: A first-principles study of uracil on Si(001)
    • Seino, K., Schmidt, W. G. & Bechstedt, F. Organic modification of surface electronic properties: A first-principles study of uracil on Si(001). Phys. Rev. B 69, 245309 (2004).
    • (2004) Phys. Rev. B , vol.69 , pp. 245309
    • Seino, K.1    Schmidt, W.G.2    Bechstedt, F.3
  • 28
    • 0029341817 scopus 로고
    • The IMEC clean - A new concept for particle and metal removal on Si surfaces
    • Meuris, M. et. al. The IMEC clean - A new concept for particle and metal removal on Si surfaces. Solid State Technol. 38, 109-114 (1995).
    • (1995) Solid State Technol. , vol.38 , pp. 109-114
    • Meuris, M.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.