A Latin-cross-shaped integrated resonant cantilever with second torsion-mode resonance for ultra-resoluble bio-mass sensing

Journal of Micromechanics and Microengineering

Volumn 18, Issue 3, 2008, Pages

  Xia, Xiaoyuan ^a,b   Zhang, Zhixiang ^a,b   Li, Xinxin ^a,b  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

^b INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

BIOMASS; BIOSENSORS; OPTICAL RESOLVING POWER; RESONANCE;

MICROCANTILEVER BIOSENSORS; TORSIONAL RESONANCE;

CANTILEVER BEAMS;

EID: 42549141150     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/3/035028     Document Type: Article

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