A piezoresistive microcantilever magnetic-field sensor with on-chip self-calibration function integrated

Microelectronics Journal

Volumn 38, Issue 2 SPEC. ISS., 2007, Pages 210-215

  Liu, Jian ^a   Li, Xinxin ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

Magnetometer; Micromachining; Piezoresistance; Self calibration; Silicon cantilever

Indexed keywords

CALIBRATION; MAGNETIC DEVICES; MAGNETIC FIELDS; MICROMACHINING; PIEZOELECTRIC DEVICES; SENSITIVITY ANALYSIS;

ALUMINUM SPIRAL; SELF-CALIBRATION; SILICON CANTILEVER; SPIRAL COIL;

SENSORS;

EID: 33846691226     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2006.11.015     Document Type: Article

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