MEMS cantilever sensor for non-destructive metrology within high-aspect-ratio micro holes

Microsystem Technologies

Volumn 16, Issue 7, 2010, Pages 1259-1268

  Peiner, Erwin ^a   Doering, Lutz ^b  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

^b Nano and Micro Metrology   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

APPLICATION EXAMPLES; AXIAL LOADING; BLIND HOLES; BUCKLING LIMITS; CANTILEVER SENSORS; CRITICAL LIMIT; DIESEL INJECTOR NOZZLES; DISPLACEMENT CHARACTERISTIC; EULER BEAM; HIGH ASPECT RATIO; HIGH ASPECT RATIO MICROSTRUCTURES; LINEAR STRAINS; MICRO CANTILEVER SENSORS; MICRO HOLES; NON DESTRUCTIVE; NON-LINEARITY; PIEZO-RESISTIVE; PINNED BEAMS; TACTILE METROLOGY; TOUCH PROBE;

ASPECT RATIO; ATOMIC FORCE MICROSCOPY; AXIAL LOADS; SENSORS; SPRAY NOZZLES; UNCERTAINTY ANALYSIS;

NANOCANTILEVERS;

EID: 77955854441     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-009-0951-x     Document Type: Conference Paper

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