Attogram detection using nanoelectromechanical oscillators

Journal of Applied Physics

Volumn 95, Issue 7, 2004, Pages 3694-3703

  Ilic, B ^a   Craighead, H G ^a   Krylov, S ^b   Senaratne, W ^c   Ober, C ^c   Neuzil, P ^d  

^a Department of Obstetrics Gynecology   (United States)

^b TEL AVIV UNIVERSITY   (Israel)

^c Cornell University   (United States)

^d INSTITUTE OF BIOENGINEERING AND NANOTECHNOLOGY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

MASS SENSORS; NANOELECTROMECHANICAL SYSTEMS (NEMS);

BOUNDARY CONDITIONS; CANTILEVER BEAMS; DEPOSITION; EIGENVALUES AND EIGENFUNCTIONS; ELECTRON BEAM LITHOGRAPHY; EVAPORATION; FINITE ELEMENT METHOD; GOLD; MICROSENSORS; OSCILLATORS (ELECTRONIC); POLYSILICON; SELF ASSEMBLY; VACUUM;

MICROELECTROMECHANICAL DEVICES;

EID: 1942542409     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1650542     Document Type: Article

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