Optimization of the signal to noise ratio of resonant microcantilever type chemical sensors

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 2, Issue , 2003, Pages 1351-1354

  Fadel, L ^a   Dufour, I ^a   Lochon, F ^a   Francais, O ^b  

^a UNIVERSITÉ BORDEAUX 1   (France)

^b Groupe ESIEE   (France)

Author keywords

Acoustic reflection; Chemical sensors; Coatings; Frequency measurement; Microsensors; Microstructure; Resonance; Resonant frequency; Ring oscillators; Signal to noise ratio

Indexed keywords

ACTUATORS; CHEMICAL SENSORS; COATINGS; DAMAGE DETECTION; MEMS; MICROSENSORS; MICROSTRUCTURE; MICROSYSTEMS; NATURAL FREQUENCIES; OSCILLATORS (ELECTRONIC); RESONANCE; SOLID-STATE SENSORS; TRANSDUCERS;

ACOUSTIC REFLECTION; CHEMICAL MICROSENSORS; DETECTION METHODS; FREQUENCY MEASUREMENTS; RESONANT MICRO CANTILEVERS; RING OSCILLATOR; SENSITIVE COATINGS; VIBRATING STRUCTURES;

SIGNAL TO NOISE RATIO;

EID: 34047136130     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1217024     Document Type: Conference Paper

References (7)

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