Low-stiffness silicon cantilevers for thermal writing and piezoresistive readback with the atomic force microscope

Applied Physics Letters

Volumn 69, Issue 18, 1996, Pages 2767-2769

  Chui, B W ^a   Stowe, T D ^a   Kenny, T W ^a   Mamin, H J ^b   Terris, B D ^b   Rugar, D ^b  

^a STANFORD UNIVERSITY   (United States)

^b IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001520375     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.117669     Document Type: Article

References (26)

1. T. R. Albrecht, S. Akamine, T. E. Carver, and C. F. Quate, J. Vac. Sci. Technol. 8, 3386 (1990).
2. J. Brugger, R. A. Buser, and N. F. de Rooij, Sens. Actuators A 34, 193 (1992).
3. O. Wolter, Th. Bayer, and J. Greschner, J. Vac. Sci. Technol. B 9, 1353 (1991).
4. A. Majumdar, P. I. Odem, J. P. Carrejo, L. A. Nagahara, J. J. Graham, and J. Alexander, Appl. Phys. Lett. 6, 2293 (1992).
5. E. S. Snow and P. M. Campbell, Appl. Phys. Lett. 64, 1932 (1994).
6. S. C. Minne, H. T. Soh, P. Flueckiger, and C. F. Quate, Appl. Phys. Lett. 66, 703 (1995).
7. H. J. Mamin, B. D. Terris, L. S. Fan, S. Hoen, R. C. Barrett, and D. Rugar, IBM J. Res. Dev. 39, 681 (1995), and references therein.
8. R. Barrett and C. F. Quate, J. Appl. Phys. 70, 2725 (1991).
9. S. Hosaka, H. Koyanagi, and A. Kikukawa, Jpn. J. Appl. Phys. 32, L464 (1993).
10. H. Kado and T. Tohda, Appl. Phys. Lett. 66, 2961 (1995).
11. H. J. Mamin and D. Rugar, Appl. Phys. Lett. 61, 1003 (1992).
12. H. J. Mamin, L. S. Fan, S. Hoen, and D. Rugar, Sens. Actuators A 48, 215 (1994).
13. S. Hoen, H. J. Mamin, and D. Rugar, Appl. Phys. Lett. 64, 267 (1994).
14. M. Tortonese, R. C. Barrett, and C. F. Quate, Appl. Phys. Lett. 62, 834 (1993).
15. M. Tortonese, in Proceedings of Transducers 91, International Conference on Solid-State Sensors and Actuators, IEEE Cat. No. 91CH2817-5, pp. 448-451.
16. M. Tortonese, Ph.D. thesis, Stanford University, 1994.
17. R. Linnemann, T. Gotszalk, L. Hadjiiski, and I. W. Rangelow, Thin Solid Films 264, 159 (1995).
18. J. Brugger, J. Burger, M. Binggeli, R. Imura, and N. F. de Rooij, in Proceedings of Transducers 95, International Conference on Solid-State Sensors and Actuators, Vol. 1, p. 636.
19. IBIS Technology Corp., 32A Cherry Hill Drive, Danvers, MA 01923.
20. R. H. M. Clevers, Physica B 147B, 305 (1987).
21. R. D. Black, M. B. Weissman, and P. J. Restle. J. Appl. Phys. 53, 6280 (1982).
22. Solecon Laboratories, 2241 Paragon Drive, San Jose, CA 95131.
23. Materials Handbook for Hybrid Electronics, edited by J. A. King (Artech House, Boston, 1987).
24. C. H. Mastrangelo, J. H.-J. Yeh, and R. S. Muller, IEEE Trans. Electron Devices 39, 1363 (1992).
25. H. J. Mamin, Appl. Phys. Lett. 69, 433 (1996).
26. S. C. Minne, S. R. Manalis, and C. F. Quate, Appl. Phys. Lett. 67, 3918 (1995).