Thermally driven micromechanical beam with piezoresistive deflection readout

Microelectronic Engineering

Volumn 67-68, Issue , 2003, Pages 550-556

  Ivanov, Tzv ^a   Gotszalk, T ^b   Grabiec, P ^c   Tomerov, E ^d   Rangelow, I W ^a  

^a UNIVERSITY OF KASSEL   (Germany)

^b WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

^c Research Group of Integrated Circuits and System Design   (Poland)

^d NTS Ltd   (Bulgaria)

Author keywords

AFM; Piezoresistive cantilever; Thermally driven cantilever

Indexed keywords

FINITE ELEMENT METHOD; INTERFEROMETRY; MICROMACHINING; MICROSCOPIC EXAMINATION;

MICROMECHANICAL BEAMS;

MICROELECTRONICS;

EID: 0037682248     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(03)00113-8     Document Type: Conference Paper

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