Self-sensing quartz-crystal cantilever for nanometric sensing

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 2513-2516

  Lin, Yu Ching ^a   Ono, Takahito ^a   Esashi, Masayoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Cantilever; Frequency modulation; Quartz crystal; Self sensing

Indexed keywords

ACTUATORS; FREQUENCY MODULATION; LATTICE VIBRATIONS; METALS; MICROSYSTEMS; MODULATION; NATURAL FREQUENCIES; OPTICAL DESIGN; OXIDE MINERALS; QUARTZ; REACTIVE ION ETCHING; SENSORS; TRANSDUCERS; VIBRATIONS (MECHANICAL);

CANTILEVER; DEEP REACTIVE ION ETCHING; EXTERNAL FORCING; FREQUENCY MODULATION (FM); HIGH SENSITIVITIES; INTERNATIONAL CONFERENCES; METAL ELECTRODES; NANOMETRIC; QUARTZ CRYSTALS; QUARTZ PLATES; QUARTZ-CRYSTAL; RESONANT FREQUENCIES; ROOM TEMPERATURES; SELF-SENSING; SOLID-STATE SENSORS; THICKNESS-SHEAR;

PHOTORESISTS;

EID: 50049120726     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300682     Document Type: Conference Paper

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