Single cell detection with micromechanical oscillators

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 19, Issue 6, 2001, Pages 2825-2828

  Ilic, B ^a   Czaplewski, D ^a   Zalalutdinov, M ^a   Craighead, H G ^a   Neuzil, P ^b   Campagnolo, C ^a   Batt, C ^a  

^a Department of Population Medicine and Diagnostic Sciences   (United States)

^b INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER BEAMS; DAMPING; ESCHERICHIA COLI; MONOLAYERS; NATURAL FREQUENCIES; OSCILLATORS (MECHANICAL); SILICON NITRIDE; THERMAL NOISE;

MICROMECHANICAL OSCILLATORS; PATHOGENIC BACTERIA;

BIOSENSORS;

EID: 0035519437     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1421572     Document Type: Article

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