Nanofabrication of sensors on cantilever probe tips for scanning multiprobe microscopy

Applied Physics Letters

Volumn 68, Issue 3, 1996, Pages 325-327

  Luo, K ^a   Shi, Z ^a   Lai, J ^a   Majumdar, A ^a  

^a University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001427544     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116074     Document Type: Article

References (16)

1. G. Binnig, H. Rohrer, Ch. Gerber, and E. Weibel, Phys. Rev. Lett. AIP 49, 57 (1982).
2. G. Binnig, C. F. Quate, and Ch. Gerber, Phys. Rev. Lett. AIP 56, 930 (1986).
3. Y. Martin and H. K. Wickramasinghe, Appl. Phys. Lett. 50, 1455 (1987); D. Rugar, H. J. Mamin, P. Guethner, S. E. Lambert, J. E. Stern, I. McFayden, and T. Yogi, J. Appl. Phys. 68, 1169 (1990).
4. D. Rugar, C. S. Yannoni, and J. A. Sidles, Nature INS 360, 563 (1992).
5. Y. Martin, D. W. Abraham, and H. K. Wickramasinghe, Appl. Phys. Lett. AIP 52, 1103 (1988).
6. E. Betzig and J. K. Trautman, Science INS 257, 189 (1992).
7. C. C. Williams and H. K. Wickramasinghe, Appl. Phys. Lett. AIP 49, 1587 (1986).
8. A. Majumdar, J. P. Carrejo, and J. Lai, Appl. Phys. Lett. AIP 62, 2501 (1992).
9. A. Majumdar, J. Lai, M. Chandrachood, O. Nakabeppu, Y. Wu, and Z. Shi, Rev. Sci. Instrum. AIP 66, 3584 (1995).
10. P. K. Hansma, B. Drake, O. Marti, S. A. C. Gould, and C. B. Prater, Science INS 243, 641 (1989).
11. R. C. Davis, C. C. Williams, and P. Neuzil, Appl. Phys. Lett. AIP 66, 2309 (1995).
12. G. Fish, O. Bouevitch, S. Kokotov, and K. Lieberman, Rev. Sci. Instrum. AIP 66, 3300 (1995).
13. H. J. Mamin, P. H. Guethner, and D. Rugar, Phys. Rev. Lett. AIP 65, 2418 (1990).
14. M. Radmacher, P. E. Hillner, and P. K. Hansma, Rev. Sci. Instrum. AIP 65, 2737 (1994).
15. J. Lai, K. Luo, and A. Majumdar, US patent pending.
16. K. Luo, Z. Shi, and A. Majumdar, submitted to J. Vac. Sci. Technol. B.