Ultrasensitive nanoelectromechanical mass detection

Applied Physics Letters

Volumn 84, Issue 22, 2004, Pages 4469-4471

  Ekinci, K L ^a,b   Huang, X M H ^a   Roukes, M L ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^b BOSTON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FLEXURAL RESONANCE FREQUENCIES; NANOELECTROMECHANICAL SYSTEMS (NEMS); TEMPERATURE FLUCTUATIONS; THERMALIZATION;

ADSORPTION; ELECTRIC RESISTANCE; FLUXES; NATURAL FREQUENCIES; PHASE LOCKED LOOPS; RESONATORS; SCANNING ELECTRON MICROSCOPY; SENSORS; SILICON CARBIDE; SPURIOUS SIGNAL NOISE; TRANSDUCERS; ULTRAHIGH VACUUM;

MICROELECTROMECHANICAL DEVICES;

EID: 3042783205     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1755417     Document Type: Article

References (20)

1. M. L. Roukes, Phys. World 14, 25 (2001).
2. C. Lu, Applications of Piezoelectric Quartz Crystal Microbalances (Elsevier, London, 1984).
3. S. S. Narine and A. J. Slavin, J. Vac. Sci. Technol. A 16, 1857 (1998).
4. M. Thompson and D. C. Stone, Surface-Launched Acoustic Wave Sensors: Chemical Sensing and Thin-Film Characterization (Wiley, New York, 1997).
5. E. A. Thundat, E. A. Wachter, S. L. Sharp, and R. J. Warmack, Appl. Phys. Lett. 66, 1695 (1995).
6. B. Ilic, D. Czaplewski, H. G. Craighead, P. Neuzil, C. Campagnolo, and C. Batt, Appl. Phys. Lett. 77, 450 (2000).
7. T. Ono, X. Li, H. Miyashita, and M. Esashi, Rev. Sci. Instrum. 74, 1240 (2003).
8. N. V. Lavrik and P. G. Datskos, Appl. Phys. Lett. 82, 2697 (2003).
9. Attogram-scale mass sensing is described in M. L. Roukes, and K. L. Ekinci, U. S. Patent 6,722,200 (20 April 2004).
10. A. N. Cleland and M. L. Roukes, Appl. Phys. Lett. 69, 2653 (1996).
11. K. L. Ekinci and J. M. Valles, Jr., Phys. Rev. B 58, 7347 (1998).
12. tot is the total resonator mass (see later discussion in the text).
13. K. L. Ekinci, Y. T. Yang, X. M. Huang, and M. L. Roukes, Appl. Phys. Lett. 81, 2253 (2002).
14. Following standard practice, the mass noise floor is defined as the added mass that will generate a frequency shift resolvable above the frequency noise floor, i.e., with signal-to-noise ratio∼1.
15. T. S. Tighe, J. Worlock, and M. L. Roukes, Appl. Phys. Lett. 70, 2687 (1997).
16. The thermalization rate between the electrons and the phonons is very short compared to any of the time scales in our experiments.
17. W. P. Robins, Phase Noise in Signal Sources (Pelegrinus, London, 1982).
18. K. L. Ekinci, Y. T. Yang, and M. L. Roukes, J. Appl. Phys. 95, 2682 (2004).
19. There is no loss of generality in this approach. Following standard analysis, the electrical noise from the transducers and subsequent stages in the readout chain can be subsumed into an "effective" voltage noise at the transducer. The VCO separately contributes to the observed frequency noise, but its measured phase noise is negligible in this work.
20. X. M. H. Huang, C. A. Zorman, M. Mehregany, and M. L. Roukes, Nature (London) 421, 496 (2003).