Switchable cantilever fabrication for a novel time-of-flight scanning force microscope

Microelectronic Engineering

Volumn 67-68, Issue , 2003, Pages 635-643

  Lee, Dong Weon ^a,b   Despont, Michel ^a   Drechsler, Ute ^a   Gerber, Christoph ^a,b   Vettiger, Peter ^a   Wetzel, Adrian ^b   Bennewitz, Roland ^b   Meyer, Ernst ^b  

^a IBM RESEARCH ZURICH   (Switzerland)

^b UNIVERSITY OF BASEL   (Switzerland)

Author keywords

Atomic imaging; Scanning force microscopy; Scanning tunneling microscopy; Switchable cantilever; Time of flight

Indexed keywords

CANTILEVER BEAMS; IMAGING SYSTEMS; MICROELECTRODES; MICROMACHINING; SCANNING TUNNELING MICROSCOPY; SWITCHING;

TIME-OF-FLIGHT SCANNING FORCE MICROSCOPY (TOF-SFM);

ATOMIC FORCE MICROSCOPY;

EID: 0038020131     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(03)00125-4     Document Type: Conference Paper

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