Analysis of resonating microcantilevers operating in a viscous liquid environment

Sensors and Actuators, A: Physical

Volumn 141, Issue 1, 2008, Pages 43-51

  Vančura, Cyril ^a   Dufour, Isabelle ^b   Heinrich, Stephen M ^c   Josse, Fabien ^c   Hierlemann, Andreas ^a  

^a ETH ZURICH   (Switzerland)

^b UNIVERSITÉ BORDEAUX 1   (France)

^c Marquette University   (United States)

Author keywords

CMOS sensor; Liquid phase operation; Resonant cantilever

Indexed keywords

CMOS INTEGRATED CIRCUITS; DAMPING; ETHANOL; GLYCEROL; SENSORS; VIBRATIONS (MECHANICAL);

LIQUID PHASE OPERATION; MICROCANTILEVERS; RESONANT CANTILEVER; VISCOUS LIQUIDS;

VISCOSITY OF LIQUIDS;

EID: 36448941524     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.07.010     Document Type: Article

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