High efficiency micromachining system applied in nanolithography

International Journal of Modern Physics B

Volumn 22, Issue 9-11, 2008, Pages 1865-1870

  Chen, Xing ^a   Lee, Dong Weon ^a   Choi, Young Soo ^a  

^a Chonnam National University   (South Korea)

Author keywords

Heater integrated cantilevers; Micro XYstage; Thermal lithography

Indexed keywords

EID: 45149093820     PISSN: 02179792     EISSN: None     Source Type: Journal    
DOI: 10.1142/s0217979208047547     Document Type: Conference Paper

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