A single-sided micromachined piezoresistive SiO2 cantilever sensor for ultra-sensitive detection of gaseous chemicals

Journal of Micromechanics and Microengineering

Volumn 16, Issue 12, 2006, Pages 2539-2546

  Li, Peng ^a   Li, Xinxin ^a,b  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

^b SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC NOISE; CHEMICALS; COMPUTER SIMULATION; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MOLECULAR ORIENTATION; SELF ASSEMBLY; SILICA; SILICON WAFERS; SINGLE CRYSTALS;

DIMETHYL METHYLPHOSPHONATE VAPOR; MICROCANTILEVER SENSOR; MOLECULAR CAPTURING;

MICROSENSORS;

EID: 33846036378     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/12/004     Document Type: Article

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