Proposal and modeling of a novel thermal microprobe using n-Si/nitrogen doped diamond cathodes

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 2, 2000, Pages 1073-1076

  Nicolaescu, Dan ^a   Filip, Valeriu ^b,c   Itoh, Junji ^a   Okuyama, Fumio ^b  

^a ELECTROTECHNICAL LABORATORY   (Japan)

^b NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

^c UNIVERSITY OF BUCHAREST   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DIODES; DOPING (ADDITIVES); ELECTRIC CURRENTS; ELECTRIC FIELD EFFECTS; NITROGEN; SEMICONDUCTING DIAMONDS; SEMICONDUCTOR DEVICE MODELS; SILICA;

THERMAL MICROPROBES;

FIELD EMISSION CATHODES;

EID: 0034155544     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591331     Document Type: Article

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