Microfabrication techniques for chemical/biosensors

Proceedings of the IEEE

Volumn 91, Issue 6, 2003, Pages 839-863

  Hierlemann, Andreas ^b   Brand, Oliver ^b,c   Hagleitner, Christoph ^b,d   Baltes, Henry ^a,b,e,f  

^a IEEE   (Switzerland)

^b ETH ZURICH   (Switzerland)

^c GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^d IBM   (Switzerland)

^e Spinoff Company Sensirion   (Switzerland)

^f Swiss Academy of Technical Sciences   (Switzerland)

Author keywords

Chemical sensors; CMOS; IC technology; Integrated sensors; Microelectromechanical systems (MEMS); Microfabrication

Indexed keywords

CHEMICAL SENSORS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MONOLITHIC INTEGRATED CIRCUITS; SEMICONDUCTOR MATERIALS; TRANSDUCERS;

INTEGRATED CIRCUIT (IC) TECHNOLOGY; INTEGRATED SENSORS; MICROELECTROMECHANICAL SYSTEMS (MEMS; MICROFABRICATION;

BIOSENSORS;

EID: 0042004671     PISSN: 00189219     EISSN: None     Source Type: Journal    
DOI: 10.1109/JPROC.2003.813583     Document Type: Review

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