Mass sensing of adsorbed molecules in sub-picogram sample with ultrathin silicon resonator

Review of Scientific Instruments

Volumn 74, Issue 3 I, 2003, Pages 1240-1243

  Ono, Takahito ^a   Li, Xinxin ^a   Miyashita, Hidetoshi ^a   Esashi, Masayoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; ANNEALING; CARBON NANOTUBES; HYDROGEN; LASER DOPPLER VELOCIMETERS; NATURAL FREQUENCIES; OXIDATION; SENSORS; SILICON; SINGLE CRYSTALS; ULTRAHIGH VACUUM;

MASS SENSING;

RESONATORS;

EID: 0037348256     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1536262     Document Type: Article

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