Self-magnetic excitation for in-plane mode resonant microsensor

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 74-77

  Seo, Jae Hyeong ^a   Brand, Oliver ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DISKS (MACHINE COMPONENTS); DRIVES; FREQUENCY STABILITY; MAGNETIC FIELD EFFECTS; MAGNETIC RESONANCE;

MAGNETIC DRIVING SCHEME; MICRORESONATORS; RESONANT MICROSENSORS; SELF MAGNETIC EXCITATION;

MICROSENSORS;

EID: 33750127618     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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