Quad-cantilever microsensors with a low-cost single-sided micro-machining technique for trace chemical vapor detection

Microelectronic Engineering

Volumn 87, Issue 11, 2010, Pages 2317-2322

  Yang, Yongliang ^a   Chen, Ying ^a   Xu, Pengcheng ^a   Li, Xinxin ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

Low cost single sided micro machining; Quad cantilever; Self assembled sensing layer; Trace TNT detection

Indexed keywords

AIR FLOW; ANISOTROPIC ETCH; CANTILEVER SENSORS; CHEMICAL VAPOR; CHEMICAL VAPOR DETECTION; ENVIRONMENTAL NOISE; FABRICATION TECHNIQUE; LOW CONCENTRATIONS; MICRO-CANTILEVERS; MOLECULE LAYERS; PIEZO-RESISTIVE CANTILEVERS; PIEZORESISTOR; SELF-ASSEMBLED; SENSING LAYERS; SIDE PROCESS; SIGNAL NOISE; SINGLE CRYSTAL SILICON; SPECIFIC DETECTION; SPOT DETECTION; TEMPERATURE FLUCTUATION; TRACE TNT DETECTION; WHEATSTONE;

ATOMIC FORCE MICROSCOPY; CHEMICAL DETECTION; COSTS; MICROMACHINING; MICROSENSORS; NANOSENSORS; SILICON COMPOUNDS; SILICON OXIDES; SILICON WAFERS; SINGLE CRYSTALS; VAPORS;

NANOCANTILEVERS;

EID: 77955517458     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2010.03.010     Document Type: Article

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