Remote optical detection using microcantilevers

Review of Scientific Instruments

Volumn 67, Issue 10, 1996, Pages 3434-3439

  Wachter, E A ^a   Thundat, T ^a   Oden, P I ^a   Warmack, R J ^a   Datskos, P G ^b   Sharp, S L ^b  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

^b Consultec Scientific Inc ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; BENDING (DEFORMATION); CHARGE COUPLED DEVICES; COATINGS; INFRARED DETECTORS; INFRARED RADIATION; METALLIC FILMS; OPTICAL PROPERTIES; SILICON NITRIDE; STRESSES;

BIMETALLIC EFFECT; MICROCANTILEVERS; NOISE EQUIVALENT POWER; OPTICAL DETECTION; OPTICAL REFLECTIVITY;

OPTICAL DEVICES;

EID: 0030264162     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1147149     Document Type: Article

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