Integrated cantilever sensors with a torsional resonance mode for ultraresoluble on-the-spot bio/chemical detection

Applied Physics Letters

Volumn 90, Issue 4, 2007, Pages

  Jin, Dazhong ^a   Li, Xinxin ^a   Bao, Hanhan ^b   Zhang, Zhixiang ^b   Wang, Yuelin ^b   Yu, Haitao ^b   Zuo, Guomin ^b  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

BIOSENSORS; FREQUENCY STABILITY; PROTEINS; Q FACTOR MEASUREMENT; RESONANCE;

MASS RESOLUTION; Q-FACTOR SIMULATION; TORSION MODE CANTILEVER SENSORS; TORSIONAL SENSOR;

CHEMICAL SENSORS;

EID: 33846570554     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2433753     Document Type: Article

References (18)

1. N. V. Lavrik and P. G. Datskos, Rev. Sci. Instrum. 75, 2229 (2004).
2. R. L. Bunde, E. J. Jarvi, and J. J. Rosentreter, Talanta 16, 417 (2001).
3. H. Zhang and E. S. Kim, J. Microelectromech. Syst. 14, 699 (2005).
4. A. Boisen, J. Thaysen, H. Jensenius, and O. Hansen, Ultramicroscopy 82, 11 (2000).
5. K. L. Ekinci, Y. T. Yang, and M. L. Roukes, J. Appl. Phys. 95, 2682 (2004).
6. L. Fadel, I. Dufour, F. Lochon, and O. Francais, in Tech. Digest, The 12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '03), Boston, MA, 8-12 June 2003, Vol. 2, pp. 1351-1354.
7. K. L. Ekinci, Appl. Phys. Lett. 84, 4469 (2004).
8. K. Peterson, W. McMillan, G. Kovacs, A. Northrup, L. Christel, and F. Pourahmadi, In Vitro Diagnostic Technology 4, 43 (1998).
9. J. Yang, T. Ono, and M. Esashi, Sens. Actuators, A 82, 102 (2000).
10. C. P. Green and J. E. Sader, J. Appl. Phys. 92, 6262 (2002).
11. M. Bao, Micro Mechanical Transducers, Handbook of Sensors and Actuators, Vol. 1 - Pressure Sensors, Accelerometers and Gyroscopes, edited by, S. Middelhoek, (Elsevier, Amsterdam, 2000).
12. T. R. Albrecht, P. Grtitter, D. Horne, and D. Rugar, J. Appl. Phys. 69, 668 (1991).
13. A. Prak, T. S. J. Lammerink, and J. H. J. Fluitman, Sens. Mater. 5, 143 (1993).
14. J. Tamayo, A. D. L. Humphris, A. M. Malloy, and M. J. Miles, Ultramicroscopy 86, 167 (2001).
15. Y. Li, C. Vancura, C. Hagleitner, J. Lichtenberg, O. Brand, and H. Baltes, in Proc., The second IEEE International Conference on Sensors, Toronto, Canada, 22-24 October 2003, pp. 809-813.
16. F. L. Walls and D. W. Allan, Proc. IEEE 74, 162 (1986).
17. A. C. Cleland and M. L. Roukes, J. Appl. Phys. 92, 2758 (2002).
18. G. Chen, T. Thundat, E. Wachter, and R. Warmack, J. Appl. Phys. 77, 3618 (1995).