Scanning force microscopy in the dynamic mode using microfabricated capacitive sensors

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 2, 1996, Pages 901-905

  Blanc, N ^a,c   Brugger, J ^a,b   De Rooij, N F ^a   Durig U ^b  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^b IBM RESEARCH ZURICH   (Switzerland)

^c PAUL SCHERRER INSTITUTE   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001453196     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589171     Document Type: Article

References (13)

1. M. Tortonese, H. Yamada, R. C. Barrett, and C. F. Quate, in The Proceedings of Transducers '91 (IEEE, Pennington, NJ, 1991), Publ. No. 91 CH2817-5, p. 448.
2. T. Itoh and T. Suga, Sensors Actuators A 43, 305 (1994).
3. S. Akamine, T. R. Albrecht, M. J. Zdeblick, and C. F. Quate, Sensors Actuators A 21, 964 (1990).
4. T. Goddenhenrich, H. Lemke, U. Hartmann, and C. Heiden, J. Vac. Sci. Technol. A 8, 383 (1990).
5. G. Neubauer, S. R. Cohen, G. M. McClelland, D. Horne, and C. M. Mate, Rev. Sci. Instrum. 61, 2296 (1990).
6. L. C. Kong, B. G. Orr, and K. D. Wise, J. Vac. Sci. Technol. B 11, 634 (1993).
7. J. Brugger, N. Blanc, Ph. Renaud, and N. F. de Rooij, Sensors Actuators A 43, 339 (1994).
8. N. Blanc, J. Brugger, and N. F. de Rooij, in Forces in Scanning Probe Methods, edited by H.-J. Guntherodt et al. [NATO ASI Ser. E: Appl. Sci. 286, 79 (1995)].
9. J. Brugger, R. A. Buser, and N. F. de Rooij, Sensors Actuators A 34, 193 (1992).
10. M. W. Putty, M.S. thesis, University of Michigan at Ann Arbor, 1988.
11. N. Blanc and U. Duerig (to be published).
12. T. R. Albrecht, P. Grütter, D. Horne, and D. Rugar, J. Appl. Phys. 69, 668 (1991); U. Dürig, O. Züger, and A. Stalder, ibid. 72, 1778 (1992).
13. T. R. Albrecht, P. Grütter, D. Horne, and D. Rugar, J. Appl. Phys. 69, 668 (1991); U. Dürig, O. Züger, and A. Stalder, ibid. 72, 1778 (1992).