Thermal imaging of thin films by scanning thermal microscope

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 2, 1996, Pages 832-837

  Oesterschulze, E ^a   Stopka, M ^a   Ackermann, L ^a   Scholz, W ^a   Werner, S ^a  

^a UNIVERSITY OF KASSEL   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0006692916     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588724     Document Type: Article

References (13)

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