Resonance-mode effect on microcantilever mass-sensing performance in air

Review of Scientific Instruments

Volumn 79, Issue 7, 2008, Pages

  Xia, Xiaoyuan ^a   Li, Xinxin ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

BIOMASS; CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; DRAG; EXPERIMENTS; FINITE ELEMENT METHOD; KETONES; MICROMACHINING; OPTICAL DESIGN; Q FACTOR MEASUREMENT; RENEWABLE ENERGY RESOURCES; RESONANCE; RESONATORS; SPEED;

AIR-DRAG; AMBIENT AIR; BIOMOLECULAR SENSING; CANTILEVER RESONATORS; DAMPING CHARACTERISTICS; DAMPING EFFECTS; DAMPING PROPERTIES; DIFFERENT MODES; FINITE-ELEMENT SIMULATIONS; FLEXURAL MODES; MICRO CANTILEVERS; MICROMACHINED CANTILEVERS; MICROMACHINING TECHNIQUES; Q FACTORS; QUALITY FACTOR; RESONANCE MODES; RESONANT CANTILEVERS; SENSING PERFORMANCE; STRING MODELS; TORSIONAL MODES;

DAMPING;

EID: 49149094612     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2949390     Document Type: Article

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