Recording on PZT and AgInSbTe thin films for probe-based data storage

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 685-688

  Lee, Dong Weon ^a   Ono, Takahito ^a   Esashi, Masayoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION; ELECTRIC HEATING ELEMENTS; HARD DISK STORAGE; LEAD COMPOUNDS; PIEZOELECTRIC MATERIALS; PROBES; RECORDING; SEMICONDUCTING BORON; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; SILVER COMPOUNDS; THIN FILMS;

ELECTRICAL RECORDING; LEAD ZIRCONIUM TITANATE; MICROHEATERS; MICROPROBES; THERMAL RECORDING;

MICROELECTROMECHANICAL DEVICES;

EID: 0036120866     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (22)