Microelectromechanical scanning probe instruments for array architectures

Review of Scientific Instruments

Volumn 68, Issue 11, 1997, Pages 4155-4162

  Miller, Scott A ^a   Turner, Kimberly L ^b   Macdonald, Noel C ^a  

^a Cornell University   (United States)

^b Department of Theoretical and Applied Mechanics and the Cornell Nanofabrication Facility   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000101357     PISSN: 00346748     EISSN: 10897623     Source Type: Journal    
DOI: 10.1063/1.1148361     Document Type: Article

References (24)

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