SU-8 cantilevers for bio/chemical sensing; fabrication, characterisation and development of novel read-out methods

Sensors

Volumn 8, Issue 3, 2008, Pages 1595-1612

  Nordström, Maria ^a   Keller, Stephan ^a   Lillemose, Michael ^a   Johansson, Alicia ^b   Dohn, Soren ^a   Haefliger, Daniel ^c   Blagoi, Gabriela ^a   Havsteen Jakobsen, Mogens ^a   Boisen, Anja ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^b PhotoSolar ApS   (Denmark)

^c Harting Mitronics AG   (Switzerland)

Author keywords

Cantilever based sensing; Label free; SU 8

Indexed keywords

CHEMICAL ANALYSIS; ELASTIC MODULI; FABRICATION;

ANALYTE DETECTION; BUFFER SOLUTIONS; CANTILEVER BASED SENSING; ENVIRONMENTAL TEMPERATURE; LABEL FREE; LOW YOUNG'S MODULUS; REDUCED SENSITIVITY; SU-8;

NANOCANTILEVERS;

EID: 41549120284     PISSN: 14243210     EISSN: 14248220     Source Type: Journal    
DOI: 10.3390/s8031595     Document Type: Review

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