Cantilever surface stress sensors with single-crystalline silicon piezoresistors

Applied Physics Letters

Volumn 86, Issue 20, 2005, Pages 1-3

  Rasmussen, P A ^a   Hansen, O ^a   Boisen, A ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; BIOCHEMISTRY; COMPUTER SIMULATION; DEFLECTION (STRUCTURES); RESISTORS; SENSORS; SILICON; SILICON WAFERS; SINGLE CRYSTALS; STRESS ANALYSIS;

CANTILEVER SURFACE STRESS SENSORS; PIEZORESISTANCE COEFFICIENTS; PIEZORESISTORS; STATIC DEFLECTIONS;

PIEZOELECTRIC DEVICES;

EID: 20844443122     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1900299     Document Type: Article

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