Fabrication and structural characterization of a resonant frequency PZT microcantilever

Smart Materials and Structures

Volumn 10, Issue 2, 2001, Pages 252-263

  Zurn, S ^a,d   Hsieh, M ^a   Smith, G ^b   Markus, D ^a   Zang, M ^a   Hughes, G ^a   Nam, Y ^a   Arik, M ^c   Polla, D ^a  

^a UNIVERSITY OF MINNESOTA   (United States)

^b AFFYMAX RESEARCH INSTITUTE   (United States)

^c University of Minnesota   (United States)

^d Integrated Magnetoelectronics (IME) Co   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; HARMONIC ANALYSIS; MICROMACHINING; NATURAL FREQUENCIES; SILICON NITRIDE; SURFACE STRUCTURE; THIN FILMS;

MICROCANTILEVERS;

PIEZOELECTRIC MATERIALS;

EID: 0035306357     PISSN: 09641726     EISSN: None     Source Type: Journal    
DOI: 10.1088/0964-1726/10/2/310     Document Type: Article

References (40)

1. Lin L, Howe R T and Pisano A P 1998 Microelectromechanical filters for signal processing J. Microelectromech. Syst. 7 286-94
2. Thundat T, Chen G Y, Warmack R J, Allison D P and Wachter E A 1995 Vapor detection using resonating microcantilevers Anal. Chem. 67 519-21
3. Chen G Y, Thundat T, Wachter E A and Warmack R J 1995 Adsorption-induced surface stress and its effects on resonance frequency of microcantilevers J. Appl. Phys. 77 3618-22
4. Prescesky S, Parameswaran M, Rawic A, Turner R F B and Reichl U 1992 Silicon micromachining technology for sub-nanogram discrete mass resonant biosensors Can. J. Phys. 70 1178-83
5. Enoksson P, Stemme G and Stemme E 1997 A silicon resonant sensor structure for coriolis mass-flow measurements J. Microelectromech. Syst. 6 119-25
6. Peterson K, Pourahmadi F, Brown J, Parsons P, Skinner M and Tudor J 1991 Resonant beam pressure sensor fabricated with silicon fusion bonding Proc. 6th Int. Conf. Solid-State Sensors and Actuators (Transducers 91) pp 664-7
7. Greenwood J and Wray T 1993 High accuracy pressure measurement with a silicon resonant sensor Sensors Actuators A 37-38 82-5
8. Burrer C, Esteve J and Lora-Tamayo E 1996 Resonant silicon accelerometers in bulk micromachining technology - an approach J. Microelectromech. Syst. 5 122-30
9. Weigold J W, Wong A C, Nguyen C T C and Pang S W 1999 A merged process for thick single-crystal Si resonators and BiCMOS circuitry J. Microelectromech. Syst. 8 221-8
10. Zook J D, Burns D W, Guckel H, Sniegowski J J, Engelstad R L and Feng Z 1992 Characteristics of polysilicon resonant microbeams Sensors Actuators A 35 51-9
11. Lammerink T S J, Elwenspoek M and Fluitman J H J 1991 Frequency dependence of thermal excitation of micromechanical resonators Sensors Actuators A 25-27 685-9
12. Roylance L M and Angell J B 1979 A batch-fabricated silicon accelerometer IEEE Trans. Electron Devices 26 1911-17
13. Peterson K E, Shartel A and Raley N F 1982 Micromechanical accelerometer integrated with MOS detection circuitry IEEE Trans. Electron Devices 29 23-7
14. Wilson C J and Beck P A 1996 Fracture testing of bulk silicon microcantilever beams subjected to a side load J. Microelectromech. Syst. 5 142-50
15. Guckel H, Sniegowski J J, Christenson T R and Raissi F 1990 The application of fine-grained, tensile polysilicon to mechanically resonant transducers Sensors Actuators A 21-23 346-51
16. Ried R P, Mamin H J, Terris B D, Fan L S and Rugar D 1997 6-MHz 2-N/m piezoresistive atomic-force-microscope cantilever with INCISIVE tips J. Microelectromech. Syst. 6 294-302
17. Lee C, Itoh T, Ohashi T, Maeda R and Suga T 1997 Development of a piezoelectric self-excitation and self-detection mechanism in PZT microcantilevers for dynamic scanning force microscopy in liquid J. Vac. Sci. Technol. B 15 1559-63
18. Luginbuhl P, Collins S D, Racine G-A, Gretillat M-A, de Rooij N F, Brooks K G and Setter N 1997 Microfabricated lamb wave devices based on PZT sol-gel thin film for mechanical transport of solid particles and liquids J. Microelectromech. Syst. 6 337-46
19. Polla D L 1994 Integrated ferroelectric microelectromechanical systems NATO/ARW Conf. on Science and Technology of Electroceramic Films (Villa del Mara, Italy, June 1994)
20. Schiller P and Polla D L 1993 Integrated piezoelectric microactuators based on PZT thin films 7th Int. Conf. on Solid-State Sensors and Actuators (Yokohama, Japan, June 1993)
21. Howe R T 1988 Surface micromachining for microsensors and microactuators J. Vac. Sci. Technol. B 6 1809-13
22. 3 bulk powders J. Mater. Res. 7 2546-54
23. Lin C T, Li L, Webb J S, Leung M S and Lipeles R A 1995 Deposition and characterization of photoconductive PZT thin films J. Electrochem. Soc. 142 1957-60
24. Wright J S and Francis L F 1995 Processing and piezoelectric properties of MOD PZT films and PZT/polymer composite coatings Proc. Ferroelectric Thin Film 5th Symp. pp 357-62
25. Hsieh M, Zurn S, Smith G and Polla D 2000 Fabrication of surface micromachined PZT MEMS J. Microelectromech. Syst. submitted
26. Kim J H, Wang L, Zurn S M, Li L, Yoon Y S and Polla D L 1997 Fabrication process of PZT piezoelectric cantilever unimorphs using surface micromachining Integrat. Ferroelectric. 15 325-32
27. Mastrangelo C H, Hsi-Jen Yeh J and Muller R S 1992 Electrical and optical characteristics of vacuum-sealed polysilicon microlamps IEEE Trans. Electron Devices 39 1363
28. Gukel H and Burns D W 1986 Fabrication techniques for integrated sensor microstructures Proc. IEEE Int. Electron Devices Meeting (San Francisco, CA, December 1986)
29. Zurn S, Mei Q, Ye C, Tamagawa T, Collins R and Polla D L 1991 Sealed vacuum microelectronic devices by surface micromachining Proc. IEEE Int. Electron Devices Meeting (Washington, DC, December 1991)
30. Magrab E 1979 Vibrations of Elastic Structural Members (Alphen ann den Rijn, The Netherlands: Sijthoff and Noordhoff)
31. Leissa A W 1969 Vibration of Plates (Washington, DC: Office of Technology Utilization National Aeronautics and Space Administration)
32. Sze S M 1994 Semiconductor Sensors (New York: Wiley) ch 3
33. Kittel C 1986 Introduction to Solid State Physics (New York: Wiley) ch 13
34. Kelly A 1994 Concise Encyclopedia of Composite Materials (Oxford: Pergamon) pp 159-65
35. Weeton J, Peters D and Thomas K 1986 Engineers Guide to Composite Materials (Metals Park, OH: American Society for Metal) ch 3
36. Yoon Y S, Kim J H, Lim T H, Bonne U A, Schmidt A M and Polla D L 1997 Fabrication processes and characteristics of microelectromechanical system using PZT films Mater. Res. Soc. Symp. Proc. 444 143-8
37. Yaralioglu G G, Altar A, Manalis S R and Quate C F 1998 Analysis and design of an interdigital cantilever as a displacement sensor J. Appl. Phys. 83 7405-15
38. Watanabe S and Fujii T 1996 Micro-fabricated piezoelectric cantilever for atomic force microscopy Rev. Sci. Instrum. 67 3898-903
39. Zook J D, Burns D W, Guckel H, Sniegowski J J, Engelstad R L and Feng Z 1992 Characteristics of polysilicon resonant microbeams Sensors Actuators A 35 51-9
40. Burdess J S, Harris A J, Wood D, Pitcher R J and Glennie D 1997 A system for the dynamic characterization of microstructures J. Microelectromech. Syst. 6 322-8