A heater-integrated scanning probe microscopy probe array with different tip radii for study of micro-nanosize effects on silicon-tip/polymer-film friction

Review of Scientific Instruments

Volumn 79, Issue 3, 2008, Pages

  Bao, Haifei ^a   Li, Xinxin ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; DATA STORAGE EQUIPMENT; FRICTION; MICROMACHINING; SCANNING PROBE MICROSCOPY; SILICON;

HEATERS; NANOPATTERNING; PROBE ARRAYS; THERMAL-PLASTIC NANOWRITINGS;

POLYMER FILMS;

EID: 41549083783     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2885682     Document Type: Article

References (22)

1. G. V. Dedkov, Phys. Usp. 43, 541 (2000).
2. Y. Pu, S. Ge, M. Rafailovich, J. Sokolov, Y. Duan, E. Pearce, V. Zaitsev, and S. Schwarz, Langmuir 17, 5865 (2001).
3. F. P. Bowden and D. Tabor, The Friction and Lubrication of Solids (Clarendon, Oxford, 1950).
4. S. Sills and R. Overney, Phys. Rev. Lett. 91, 095501 (2003).
5. U. Schwarz, O. Zwörner, P. Köster, and R. Wiesendanger, Phys. Rev. B 56, 6987 (1997).
6. R. Carpick, N. Agrat, D. Ogletree, and M. Salmeron, J. Vac. Sci. Technol. B 14, 1289 (1996).
7. D. Fryer, P. Nealey, and J. de Pablo, Macromolecules 33, 6439 (2000).
8. K. Fukao, Eur. Phys. J. E 12, 119 (2003).
9. J. Hammerschmidt, W. Gladfelter, and G. Haugstad, Macromolecules 32, 3360 (1999).
10. H. Mamin, Appl. Phys. Lett. 69, 433 (1996).
11. B. Gotsmann and U. Dürig, Langmuir 20, 1495 (2004).
12. B. Terris, S. Rishton, H. Mamin, R. Ried, and D. Rugar, Appl. Phys. A: Mater. Sci. Process. 66, S809 (1998).
13. R. Chui, T. Stowe, T. Kenny, H. Mamin, B. Terris, and D. Rugar, Appl. Phys. Lett. 69, 2767 (1996).
14. W. King, T. Kenny, K. Goodson, G. Cross, M. Despont, U. Dürig, H. Rothuizen, and G. Binnig, Appl. Phys. Lett. 78, 1300 (2001).
15. J. Sharp and J. Forrest, Phys. Rev. E 67, 031805 (2003).
16. K. Schmidt-Rohr, A. Kulik, H. Beckham, A. Ohlemacher, U. Pawelzik, C. Boeffel, and H. Spiess, Macromolecules 27, 4733 (1994).
17. L. Hartmann, W. Gorbatschow, J. Hauwede, and F. Kremer, Eur. Phys. J. E 8, 145 (2002).
18. D. Fryer, R. Peters, E. Kim, J. Tomaszewski, J. de Pablo, P. Nealey, C. White, and W. Wu, Macromolecules 34, 5627 (2001).
19. R. Marcus, T. Ravi, T. Gmitter, K. Chin, D. Liu, W. Orvis, D. Ciario, C. Hunt, and J. Trujillo, Appl. Phys. Lett. 56, 236 (1990).
20. M. Wubbenhorst, Proceedings of the School on Polymers and Composites for Microelectronics and Robotics, Great Mazurian Lakes, Poland, 2004 (unpublished), p. 50.
21. P. Heydemann, H. Guicking, Kolloid Z. Z. Polym. 193, 16 (1963).
22. J. Richeton, G. Schlatter, K. Vecchio, Y. Ŕmond, and S. Ahzi, Polymer 46, 8194 (2005).