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Volumn 13, Issue 2, 2002, Pages 212-217
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A MEMS nanoplotter with high-density parallel dip-pen nanolithography probe arrays
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Author keywords
[No Author keywords available]
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Indexed keywords
ARRAYS;
LITHOGRAPHY;
MICROELECTROMECHANICAL DEVICES;
MICROMACHINING;
MONOLAYERS;
PROBES;
SEMICONDUCTOR DOPING;
SILICON NITRIDE;
NANOPLOTTERS;
NANOTECHNOLOGY;
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EID: 0036541364
PISSN: 09574484
EISSN: None
Source Type: Journal
DOI: 10.1088/0957-4484/13/2/315 Document Type: Article |
Times cited : (132)
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References (10)
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