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Volumn 13, Issue 2, 2002, Pages 212-217

A MEMS nanoplotter with high-density parallel dip-pen nanolithography probe arrays

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; LITHOGRAPHY; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MONOLAYERS; PROBES; SEMICONDUCTOR DOPING; SILICON NITRIDE;

EID: 0036541364     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/13/2/315     Document Type: Article
Times cited : (132)

References (10)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.