A MEMS nanoplotter with high-density parallel dip-pen nanolithography probe arrays

Nanotechnology

Volumn 13, Issue 2, 2002, Pages 212-217

  Zhang, Ming ^a   Bullen, David ^a   Chung, Sung Wook ^b   Hong, Seunghun ^b,c   Ryu, Kee S ^a   Fan, Zhifang ^a   Mirkin, Chad A ^b   Liu, Chang ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b NORTHWESTERN UNIVERSITY   (United States)

^c Florida State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; LITHOGRAPHY; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MONOLAYERS; PROBES; SEMICONDUCTOR DOPING; SILICON NITRIDE;

NANOPLOTTERS;

NANOTECHNOLOGY;

EID: 0036541364     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/13/2/315     Document Type: Article

References (10)