Integrated SPM probes with NEMS technology

Sensors and Actuators, A: Physical

Volumn 133, Issue 2 SPEC. ISS., 2007, Pages 383-387

  Li, Xinxin ^a   Han, Jianqiang ^a   Bao, Haifei ^a   Yang, Zunxian ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

Data storage; Maskless etching; SPM probe

Indexed keywords

ATOMIC FORCE MICROSCOPY; ETCHING; IMAGE QUALITY; MICROELECTROMECHANICAL DEVICES; SENSORS; THIN FILMS;

DATA STORAGE; MASKLESS ETCHING; SCANNING PROBE MICROSCOPY (SPM) PROBES;

PROBES;

EID: 33846503885     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.06.042     Document Type: Article

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